日 時:2009年 4月 8日(水)16:00~17:00
場 所:南7号館 1階 101会議室(学科会議室)
講 師:Prof. Junghyun Cho (Dept. of Mechanical Engineering &
Materials Science and Engineering Program, State
University of New York (SUNY) at Binghamton, NY, U.S.A.)
* : Visiting Scholar in Ceramic Science at Tokyo Tech until
Jan. 16, 2010
講演題目:「Low-Temperature Ceramic Thin Film Processing for
Electronic Devices」
講演内容:
Ceramic thin films and coatings such as TiO2, ZrO2, SnO2, ZnO and SiO2 have
received great attention for use not only as a functional component (e.g.,
dielectrics, semiconductors, photovoltaics, sensors) but also as an
effective protective layer for metals, polymers, silicon, and biomaterials.
These films, however, suffer from inherent brittleness and easy spallation
upon mechanical and thermal stress. In addition, high-temperature
processing is normally required for achieving sufficiently dense and
crystalline structures, which limits their use in many innovative
applications. Therefore, low-temperature processing along with
damage-tolerance capability has been a key in the recent development of
ceramic film processing. Current developments in flexible electronics,
which can be portable and rollable, also require ceramic films to be
processed at low temperatures (< 100’C). In an effort to fabricate such
ceramic thin films with enhanced reliability, the solution processing
method using aqueous precursor solution was devised. It was shown that bulk
precipitation through homogeneous nucleation in supersaturated solution is
responsible for film formation, which can be controlled through various
deposition parameters (pH, temperature, concentration, electric potential).
This processing mechanism is quite similar to the formation of biominerals
such as nacre and sea urchin spine in that in-situ precipitation of
nanoparticles and proper surface functionalization of the substrate tailor
ceramic film formation and its microstructure development. In this
presentation, comprehensive characterization of the nano- and
microstructural developments of the ceramic films will be discussed with
associated properties. Construction of the generic processing map based on
better understanding of nucleation/growth mechanisms of ceramic
nanoparticles and particle interactions would offer guidance for processing
of various microstructure-adjustable ceramic films at low temperatures.
問合せ先:篠崎和夫,内線: 2518,e-mail: [email protected]